AFS Furnace advantage
Outstanding performance, reduced manufacturing costs and improved overall yields

1. A small footprint saves up to 30% of clean room space
2. Superior process uniformity
3. Stable control system and user friendly operation interface
4. Energy saving

AFS Horizontal furnace configuration
AFS furnace offers great value to the small, medium and large silicon wafer manufacturer.
The systems are available in various sizes and configuration as described in the table below.