AFS Vertical furnace configuration
The Vertical furnace systems are available in various sizes and configuration as described in the table below.

AFS furnace applications
AFS Furnace systems can be used for all AP and LPCVD processes employed in the semiconductor industry, including:

• Dry and wet thermal Oxides
• Drive in diffusion furnace
• Alloy anneal furnace
• LPCVD Low Stress Poly-Silicon Films
• LPCVD System for Low Strain Si3N4 Films
• HTO films deposition
• LTO films deposition