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Batch type PECVD Systems :
Machine: ASM batch PECVD
Application: Low stress Nitride, Oxide
• Substrate size: 6”.
• Uniformity < ± 10%
• Capacity: 10k pieces/month
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Single wafer type PECVD Systems :
Machine: AMAT P5000 PECVD
Application: PE Nitride, TEOS Oxide
• Substrate size: 6”.
• High uniformity SiN and oxide was achieved.
• Uniformity < ± 2% (@Thickness 20nm)
• Capacity: 10k pieces/month
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LPCVD Systems :
Machine: TEL LPCVD
Application: Nitride, low stress SiN
• Substrate size: 6”.
• High uniformity SiN was achieved.
• Uniformity < ± 5% (@Thickness 20nm)
• Capacity: 10k pieces/month
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Thermal oxide Systems :
Machine: AFS oxidation furnace
Application: Dry thermal oxide
• Substrate size: 6”.
• Uniformity < ± 5% (@Thickness 20nm)
• Capacity: 10k pieces/month
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Low pressure Furnace systems :
Machine: AFS LP Curing furnace
Application: P.I., BCB curing
• AFS vacuum furnace for ILD curing
• Temperature: 100 ~450 degree C
• Vacuum : 5 x 10-5 torr
• Gas: N2
• Capacity: 10k pieces/month
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Cluster Single wafer sputter Systems :
Machine: CVC cluster sputter systems
Application: TaN 、TiW、Ta2O5、Ta、NiCr
•Substrate size: 6".
•Pre-sputter of RF back etching capability.
•Reactive sputter capability.
•Substrate Heating (up to 300℃) capability.
•Continue multi layer process capability.
•Uniformity < ± 5% (@Thickness 20nm)
•Capacity: 10k pieces/month
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Batch type sputter Systems :
Machine: MRC643 Vertical sputter systems
Application: CrSi、AL
• Substrate size: 6".
• Pre-sputter of RF back etching capability.
•Continue multi layer process capability.
• Uniformity < ± 7%
• Capacity: 10k pieces/month
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Batch sputter Systems :
Machine: Fulintec Vertical sputter systems
Application: Ti、Cu
•Substrate size: 6" or 8".
•Pre-sputter of RF back etching capability.
•Continue multi layer process capability.
•Uniformity < ± 10%
•Capacity: 30k pieces/month
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E-beam deposition Systems :
Machine: CHA e-beam deposition systems.
Application: Ti、Cu、Ni、Au multilayer
• Substrate size: 6"
• Vacuum: 5 x10-7 torr
• Continue multi layer process capability.
• Uniformity < ± 10%
• Capacity: 3k pieces/month
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