|
|
|
|
|
|
|
|
|
 |
Metrology Tools |
|
|
◆
Ellipsometer
Machine: Rudolph Research Auto EL IV
Application:
Thin film n, k and thickness measurement.
|
 |
◆
Nanospec meter
Machine: Nanospec AFT Model 210
Application:
Thin film thickness measurement. |
 |
| ◆ |
|
TENCOR α Step |
| |
|
|
|
|
Machine: Tencor A200
Application:
Electrical pattern step high measurement. |
|
 |
◆
X-ray Fluorescence Thickness Gauge
Machine: SII SFT7305
Application:
Electrical plating metal film thickness measurement.
Chemical plating solution measurement.
|
 |
◆Stress meter
Machine: SMSI 3800
Application:
Film deposition introduced stress measurement. |
 |
|
|
|
|
|
| |
 |
|
●Advanced Furnace Systems Corp.
●SOUTHERN TAIWNA SCENCE PARK
●Add :
3F.-2, No.19, Nanke 3rd Rd., Sinshih Township, Tainan County 744, Taiwan (R.O.C.)
●E-mail: cmchu.afs@msa.hinet.net
●Tel : +886-6-505-3705 Ext : 10
●Fax :+886-6-505-3711 |
|
|
|
|
