Button 1 Button 2 Button 3 Button 4


 

AFS Horizontal Furnace
AFS Vertical Furnace
AFS Furnace control systems
Furnace related parts

ESC sputter systems

 
 
 
 
ESC sputter systems

RANGE OF NEW EQUIPMENT AVAILABLE:
‧ 944 in line Sputter systems
‧ ELAS in line Sputter systems
‧ R&D Sputter systems
‧ Used MRC sputter systems

944 in line Sputter systems


Main features:

‧ Dual level load lock
‧ CTI 10” cryo pump on chamber as standard.
‧ CTI 8” cryo, turbo pump or rotary pump available on load lock.
‧ RF etch station as standard.
‧ The 944 can be used with a variety of different substrates.
‧ The 944 can be used with a variety of different materials.
‧ Fully automated process control.
‧ The system has been designed by maintenance engineers to make the system easy for maintenance .
‧ Many software features added to make system set-up easy.

 

  ELAS in line Sputter systems

Main features:

‧ Dual level load lock
‧ CTI 10” cryo pump on chamber as standard.
‧ CTI 8” cryo, turbo pump or rotary pump available on load lock.
‧ 3 Target plus RF etch station as standard.
‧ Dual level load lock.
‧ Through wall mounting for very small cleanroom footprint.
‧ Large area substrate.
‧ Up to 400mm X 420mm
‧ 4 pieces 200mm WAFERS
‧ 6 pieces 150mm WAFERS
‧ Cassette to Cassette operation for 4”, 6” and 8” wafers. Using industry standard Brooks robot system.




R &D Sputter systems

Main features:

‧ Load lock system.
‧ Multi target system.
‧ Co sput of up to three materials (RF or DC) plus substrate bias.
‧ RF Etch station in load lock
‧ 8” substrates.
‧ Full recipe control.
‧ System can be configured to meet customers individual requirements.
‧ If it requires a vacuum and a plasma ESC will try to help you configure a system.




Used MRC Sputter systems:

MRC 602,603
MRC 902,903
MRC 943


Main features:

‧ Dual level load lock
‧ CTI 8” cryo pump on chamber as standard.
‧ Rotary pump available on load lock.
‧ RF etch station as standard.
‧ The 903 can be used with a variety of different substrates.
‧ The 903 can be used with a variety of different materials.
‧ Semi-auto process control.
‧ The system has been designed by maintenance engineers to make the system easy for maintenance ..

 
 
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●Advanced Furnace Systems Corp.
●SOUTHERN TAIWNA SCENCE PARK
●Add : 3F.-2, No.19, Nanke 3rd Rd., Sinshih Township, Tainan County 744, Taiwan (R.O.C.)
●E-mail: cmchu.afs@msa.hinet.net
●Tel : +886-6-505-3705 Ext : 10
●Fax :+886-6-505-3711