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微影製程技術
濕式製程技術
薄膜製程技術
乾蝕刻製程技術
製程分析設備


   

   


   
 
濕式製程 Wet Process

 

◆ 單晶片濕蝕刻機

機台:DNS SPW812
製程:金屬蝕刻

•Substrate size: 6”.

•Capacity: 10k pieces/month




◆ 電鍍機

機台:銅電鍍機
製程:銅電鍍

•Substrate size: 6”.

•High uniformity Cu plating was achieved.
•EP thickness: 5um~10um
•Uniformity < ± 10% (Thickness 10um)
•Capacity: 10k pieces/month




◆ 濕式光阻清洗機

機台:Kaijo bocket cleaner
製程:光阻去除

•Substrate size: 6".

•Capacity: 10k pieces/month




◆ 晶片刷洗機

機台:DNS 629 scrubber
製程:光阻去除

•Substrate size: 6".

•刷毛刷洗
•高壓水柱沖洗
•Capacity: 10k pieces/month




◆ 無電極電鍍系統

機台:無電極電鍍機
Ni(2.5~6um)/ Fresh Gold(0.05~0.1um) electro-less plating
Ni(2.5~6um)/ Thick Gold(0.4~0.5um) electro-less plating

•High uniformity and high stability electro-less plating was achieved.

•Ni/Au on Ag, Ag-Pt, Ag-Pd, Cu were achieved.
•Substrate type: Si, Glass, Ceramic, LTCC substrate.
•Uniformity < ± 10%
•Capacity: 10k pieces/month


Ni(2.5~6um)/ Pd(0.1~0.3um) /Fresh Gold(0.05~0.1um) electro-less plating

•High uniformity and high stability electro-less plating was achieved.
•Ni/Pd/Au on Ag, Ag-Pt, Ag-Pd, Cu were achieved.
•Substrate type: Si, Glass, Ceramic, LTCC substrate
•Uniformity < ± 10%
•Capacity: 10k pieces/month




 

 

 



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可靠的製程品質、有競爭力的代工價格、有競爭力的產品 -弗侖斯系統 - 您可以信賴的代工夥伴!
●Advanced Furnace Systems Corp.
●SOUTHERN TAIWNA SCENCE PARK
●Add : 3F.-2, No.19, Nanke 3rd Rd., Sinshih Township, Tainan County 744, Taiwan (R.O.C.)
●E-mail: cmchu.afs@msa.hinet.net
●Tel : +886-6-505-3705 Ext : 10
●Fax :+886-6-505-3711